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Atomic Layer Deposition (Ald) PDF
By:Jeannie Valdez
Published on 2015-12-01 by

Atomic layer deposition (ALD) is a thin film deposition technique used in the mass production of microelectronics. In this book, novel nonvolatile memory devices are discussed. The chapters examine the low-temperature fabrication process of single-crystal platinum non-thin films using plasma-enhanced atomic layer deposition (PEALD). A comprehensive review of ALD surface coatings for battery systems is provided, as well as a theoretical calculation on the mechanism of thermal and plasma-enhanced atomic layer deposition of SiO2; and fluorine doping behavior in Zn-based conducting oxide film grown by ALD.

This Book was ranked at 11 by Google Books for keyword Depositions.

Book ID of Atomic Layer Deposition (Ald)'s Books is RuQijgEACAAJ, Book which was written byJeannie Valdezhave ETAG "JYOwRPpL9CM"

Book which was published by since 2015-12-01 have ISBNs, ISBN 13 Code is 9781634838696 and ISBN 10 Code is 1634838696

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Download Atomic Layer Deposition (Ald) PDF Free

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